Request for Quotation
Contact-Information
Company
Subject
Your Name
E-mail Address
Phone
Fax
Photomask Specifications
Plate material
Soda Lime (SL)
Quarz (QZ)
Borofloat
Other Specification:
Light Absorbing Layer
Low Reflective Chromium (LRC) - standard
High Reflective Chromium (HRC)
Blue-Chrome-Blue (BCB)
Other Specification:
Plate Size
Format (in inches)
in brackets = standard stock materials
3x3x0.060 (LRC, SL & QZ )
3x3x0.090 (LRC, QZ)
4x4x0.090 (LRC, SL & QZ)
5x5x0.090 (LRC, SL & QZ)
5x5x0.040 (BCB, SL)
5x5x0.020 (LRC & BCB, SL)
6x6x0.120 (LRC, SL & QZ)
6x6x0.060 (LRC, SL)
7x7x0.120 (LRC, SL & QZ)
9x9x0.120 (LRC, SL)
Other Size + Thickness Specification:
Minimum Dimensions
≥ 10 µm
≥ 5 µm
≥ 2 µm
≥ 1 µm
Dimensional Tolerances
+/- 0.5 µm
+/- 0.35 µm
+/- 0.25 µm
Data Input Format
GDS II
AutoCAD DXF
Other Formats:
Defect Density
0.2 per cm²
0.5 per cm²
Other:
Mask Orientation
Mask seen from the chrome side
Working Plate
Dark areas are chrome
Master
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